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@article{,
author = {Michelle Mueller and Verena Maiwald and Lothar Thiele and Jan Beutel and Cosmin Roman and Christofer Hierold},
title = {Two-level bulk microfabrication of a mechanical broadband vibration amplitude-amplier with ten coupled resonators},
journal = {Journal of Micromechanics and Microengineering},
number = {28},
month = {Feb},
year = {2018}
}
