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Authors: | Michelle Mueller, Verena Maiwald, Lothar Thiele, Jan Beutel, Cosmin Roman and Christofer Hierold |
Group: | Computer Engineering |
Type: | Article |
Title: | Two-level bulk microfabrication of a mechanical broadband vibration amplitude-amplier with ten coupled resonators |
Year: | 2018 |
Month: | February |
Journal: | Journal of Micromechanics and Microengineering |
Number: | 28 |
Keywords: | SN |
Resources: | [BibTeX] [ External LINK ] [Paper as PDF] |